Rapid Thermal Annealing System – Solaris 100
Description
The Surface Science Integration (SSI) Solaris 100 is a manual loading RTA system for research and development and pre-production:
- Wafer capability: 1″ to 4″
- Operating Temperature Range: room temperature to 1250°C
- Option of top side or bottom side heating to reduce non-uniform heating
- 9 different graphing options
- Excellent repeatability
