Fee-for-Service | Research and innovation

Scientist doing work at a computer wearing a hair net — Research and innovation

NanoFab

Fee-for-Service

Internal and external clients can hire one of our qualified lab technologists to complete lab work on their behalf at an hourly rate. We offer fee-for-service on all of our tools.

Please send an email to the NanoFab Administrative Assistant with the following details:

Name
Company / Organization
Please provide:
- a short description of the work you would like to complete
- the timeframe for when you are looking to complete your work
- the maximum amount of time you are willing to invest in the project
Please attach a PDF to your email with more information if necessary

Price List

Through the purchase of a membership, internal or external clients can obtain unlimited access to the NanoFab facilities and equipment within our three labs including tool training provided by a lab technologist.

Minimum charge of 1 hour or 1 run.

Internal (uOttawa)

A quote will be provided prior to beginning the work. A FOAP is required for payment of the final invoice via journal entry.

External – Academic and Non-Academic

A quote will be provided prior to beginning the work. Payment of the final invoice can be made via cheque or wire transfer.

Service Option	Description of Service (all services include technologist time)	Service Unit		Cost/unit
			Internal (UofO) Clients	External, Academic Clients	External, Non-Academic Clients
1	SEM imaging Raith Pioneer or Gemini500	Hour	40	80	240
2	Electron beam lithography Raith Pioneer	Run	To be negotiated	To be negotiated	To be negotiated
3	Chambered sample processing ex. Etching, Rapid Thermal Annealing System Includes process gases	Hour	40	80	240
4	Metal deposition Angstrom Nexdep Evaporator Includes common metals (precious metals - $1.90/nm)	Run	100	200	300
5	Wet processing ex. Glovebox, etching Includes common consumables	Hour	40	80	240
6	Metrology work ex. AFM, Elipsometer, Metricon, Profilometer	Hour	40	80	240
7	Photolithography work ex. Mask Aligner, resist processing	Hour	40	80	240
8	Post-processing and sample preparation ex. Wire bonding, Solder reflow, Sputtering Includes common metals (precious metals - $1.90/nm)	Hour	40	80	240
9	Ga ion beam milling for cross-section imaging and/or HE ion beam microscopy, ORION Nanofa	Hour	80	160	320
10	Ga or He ion beam milling for nanofabrication, ORION Nanofab	Run	To be negotiated	To be negotiated	To be negotiated

NanoFab Fees

Image of the exterior of ARC created with a helium ion beam

Orion NanoFab HIM/FIB

Atomic Force Microscope (AFM)

Image of a tri-layer photolithography stack with a flake broken off revealing its thickness

Scanning Electron Microscope (SEM)

Need help with microfabrication costs?

CMC Microsystems offers MNT Financial Assistance to help academic researchers meet their micro-nano R&D goals. This competitive award program is intended to lower the barriers associated with conducting custom microfabrication at labs across Canada.

Apply today!